| 2024-03 |
Reducing contact resistance of MoS2-based field effect transistors through uniform interlayer insertion via atomic layer deposition |
Journal of Chemical Physics
|
| 2024-03 |
Investigation on Contact Properties of 2D van der Waals Semimetallic 1T-TiS2/MoS2 Heterojunctions |
ACS Applied Materials & Interfaces
|
| 2024-02 |
Ultrafast and thermally stable ternary Ge0.33SexSy ovonic threshold switching selector using magnetron sputtering |
Journal of Alloys and Compounds
|
| 2024-02 |
Atomic layer deposited RuO2 with controlled crystallinity and thickness for oxygen evolution reaction catalysis |
Vacuum
|
| 2024-02 |
Selective passivation of 2D TMD surface defects by atomic layer deposited Al2O3 to enhance recovery properties of gas sensor |
Applied Surface Science
|
| 2024-01 |
Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition |
Journal of Chemical Physics
|
| 2024-01 |
Recent Advances in Functionalization and Hybridization of Two‐Dimensional Transition Metal Dichalcogenide for Gas Sensor |
Advanced Engineering Materials
|
| 2024-01 |
Atomic layer deposition of Pt nanoparticles using dimethyl (<i>N</i>, <i>N</i>–dimethyl-3-butene-1-amine−<i>N</i>) platinum and H2 reactant and its application to 2D WS2 photodetectors |
Journal of Vacuum Science and Technology A
|
| 2024-01 |
Investigation of the hydrophilic nature and surface energy changes of HfO2 thin films prepared by atomic layer deposition |
Vacuum
|
| 2024-01 |
Investigation of direct surface charge transfer of glutamic acids on 2D monolayer molybdenum disulfide and its sensing properties |
Applied Surface Science
|
| 2023-12 |
Phase composition of polycrystalline HfNx (0.45≤x≤1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties |
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|
| 2023-12 |
Role of a surface hydroxyl group depending on growth temperature in atomic layer deposition of ternary oxides |
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|
| 2023-12 |
Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array |
Journal of Alloys and Compounds
|
| 2023-12 |
Efficient solar fuel production enabled by an iodide oxidation reaction on atomic layer deposited MoS |
Carbon Energy
|
| 2023-10 |
Defect-Selective Functionalization of 2D-WS2 Nanofilms with Pt Nanoparticles for Enhanced Room-Temperature NO2 Gas Sensing |
ACS Applied Nano Materials
|
| 2023-06 |
Amorphous Ge-Se-S chalcogenide alloys via post plasma sulfurization of atomic layer deposition GeSe for ovonic threshold switch applications |
Journal of Alloys and Compounds
|
| 2023-04 |
Methodology for Plasma Diagnosis and Accurate Virtual Measurement Modeling using Optical Emission Spectroscopy |
IEEE Sensors Journal
|
| 2023-04 |
Quantitative Two-Stage Classification of Gas Mixtures Using 2-D TMDC and PGM Chalcogenides |
IEEE Sensors Journal
|
| 2023-03 |
Dysprosium Incorporation for Phase Stabilization of Atomic-Layer- Deposited HfO2 Thin Films |
Chemistry of Materials
|
| 2023-01 |
Ge1−xSx chalcogenide alloys for OTS applications using magnetron sputtering |
Journal of Alloys and Compounds
|
| 2022-11 |
Ionic Liquid-Mediated Route to Atomic Layer Deposition of Tin(II) Oxide via a C-C Bond Cleavage Ligand Modification Mechanism |
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
|
| 2022-09 |
Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization
|
Rare Metals
|
| 2021-12 |
Group IV Transition Metal (M = Zr, Hf) Precursors for High-κ Metal Oxide Thin Films |
INORGANIC CHEMISTRY
|
| 2021-12 |
Optical Reflection from Unforbidden Diffraction of Block Copolymer Templated Gyroid Films |
ACS MACRO LETTERS
|
| 2021-12 |
Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors |
APPLIED SURFACE SCIENCE
|
| 2021-11 |
Photocurrent Enhancement of PtSe2 Photodetectors by Using Au Nanorods |
Photonics
|
| 2021-11 |
Atomic-Layer-Deposition-Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications |
ADVANCED MATERIALS
|
| 2021-08 |
Reaction Mechanisms of Non-hydrolytic Atomic Layer Deposition of Al2O3 with a Series of Alcohol Oxidants |
JOURNAL OF PHYSICAL CHEMISTRY C
|
| 2021-08 |
Synthesis and Application of AgBiS2 and Ag2S Nanoinks for the Production of IR Photodetectors |
ACS Omega
|
| 2021-07 |
Interface Defect Engineering of a Large-Scale CVD-Grown MoS2 Monolayer Via Residual Sodium at the SiO2/Si Substrate |
ADVANCED MATERIALS INTERFACES
|
| 2021-05 |
PE-ALD of Ge1−xSx amorphous chalcogenide alloys for OTS applications |
JOURNAL OF MATERIALS CHEMISTRY C
|
| 2021-05 |
Hydrogen Barriers Based on Chemical Trapping Using Chemically Modulated Al2O3 Grown by Atomic Layer Deposition for InGaZnO Thin-Film Transistors |
ACS APPLIED MATERIALS & INTERFACES
|
| 2021-05 |
2D MoS2 Charge Injection Memory Transistors Utilizing Hetero-Stack SiO2/HfO2 Dielectrics and Oxide Interface Traps |
ADVANCED ELECTRONIC MATERIALS
|
| 2021-03 |
MoS2 doping by atomic layer deposition of high-k dielectrics using alcohol as process oxidants |
APPLIED SURFACE SCIENCE
|
| 2020-10 |
2D Transition Metal Dichalcogenide Heterostructures for p- and n-Type Photovoltaic Self-Powered Gas Sensor |
ADVANCED FUNCTIONAL MATERIALS
|
| 2020-05 |
Atomic layer deposition of a uniform thin film on two-dimensional transition metal dichalcogenides |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
|
| 2020-05 |
Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes |
THIN SOLID FILMS
|
| 2020-04 |
Atomic layer deposition for nonconventional nanomaterials and their applications |
JOURNAL OF MATERIALS RESEARCH
|
| 2020-02 |
Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition |
ACS NANO
|
| 2020-02 |
Rate performance enhancement of lithium-ion battery using precise thickness-controllable-carbon-coated titanium dioxide nanowire array electrode via atomic layer deposition |
ELECTROCHIMICA ACTA
|
| 2020-01 |
Surface Energy Change of Atomic-scale Metal Oxide Thin Films by Phase Transformation |
ACS NANO
|
| 2020-01 |
Comparative study on atomic layer deposition of HfO2 via substitution of ligand structure with cyclopentadiene |
JOURNAL OF MATERIALS CHEMISTRY C
|
| 2019-11 |
Synthesis of two-dimensional MoS2/graphene heterostructure by atomic layer deposition using MoF6 precursor |
APPLIED SURFACE SCIENCE
|
| 2019-11 |
Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery |
ELECTROCHIMICA ACTA
|
| 2019-10 |
Improved Sensitivity in Schottky Contacted Two-Dimensional MoS2 Gas Sensor |
ACS APPLIED MATERIALS & INTERFACES
|
| 2019-10 |
Moisture barrier properties of low-temperature atomic layer deposited Al2O3 using various oxidants |
CERAMICS INTERNATIONAL
|
| 2019-10 |
Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition |
CERAMICS INTERNATIONAL
|
| 2019-09 |
Out-of-plane piezoresponse of monolayer MoS2 on plastic substrates enabled by highly uniform and layer-controllable CVD |
APPLIED SURFACE SCIENCE
|
| 2019-08 |
Hydrogen barrier performance of sputtered La2O3 films for InGaZnO thin-film transistor |
JOURNAL OF MATERIALS SCIENCE
|
| 2019-08 |
Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor |
APPLIED SURFACE SCIENCE
|
| 2019-06 |
Phase-controlled synthesis of SnOx thin films by atomic layer deposition and post-treatment |
APPLIED SURFACE SCIENCE
|
| 2019-01 |
Textile-based high-performance hydrogen evolution of low-temperature atomic layer deposition of cobalt sulfide |
NANOSCALE
|
| 2019-01 |
Bi-layer high-k dielectrics of Al2O3/ZrO2 to reduce damage to MoS2 channel layers during atomic layer deposition |
2D MATERIALS
|
| 2018-11 |
Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films |
ACS APPLIED MATERIALS & INTERFACES
|
| 2018-11 |
Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics |
JOURNAL OF MATERIALS SCIENCE
|
| 2018-11 |
Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications |
APPLIED SURFACE SCIENCE
|
| 2018-11 |
Molecular oxidation of surface-CH3 during atomic layer deposition of Al2O3 with H2O, H2O2, and O3: a theoretical study |
APPLIED SURFACE SCIENCE
|
| 2018-10 |
High-Performance Gas Sensor Using a Large-Area WS2xSe2-2x Alloy for Low-Power Operation Wearable Applications |
ACS APPLIED MATERIALS & INTERFACES
|
| 2018-09 |
Simultaneous improvement of the dielectric constant and leakage currents of ZrO2 dielectrics by incorporating a highly valent Ta5+ element |
JOURNAL OF MATERIALS CHEMISTRY C
|
| 2018-09 |
High-Performance Flexible ZnO Nanorod UV/Gas Dual Sensors Using Ag Nanoparticle Templates |
ACS APPLIED MATERIALS & INTERFACES
|
| 2018-08 |
Direct observation of leakage currents in a metal-insulator-metal capacitor using in situ transmission electron microscopy |
NANOTECHNOLOGY
|
| 2018-06 |
Dielectric function, critical points, and Rydberg exciton series of WSe2 monolayer |
JOURNAL OF PHYSICS-CONDENSED MATTER
|
| 2018-06 |
Recovery Improvement for Large-Area Tungsten Diselenide Gas Sensors |
ACS APPLIED MATERIALS & INTERFACES
|
| 2018-06 |
Comparative study of the growth characteristics and electrical properties of atomic-layer-deposited HfO2 films obtained from metal halide and amide precursors |
JOURNAL OF MATERIALS CHEMISTRY C
|
| 2018-06 |
Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films |
SURFACE & COATINGS TECHNOLOGY
|
| 2018-05 |
Amorphous TiO2/p-Si Heterojunction Photodiode Prepared by Low-Temperature Atomic Layer Deposition |
NANOSCIENCE AND NANOTECHNOLOGY LETTERS
|
| 2018-05 |
Surface Wettability of Nitrogen-Doped TiO2 Films Prepared by Atomic Layer Deposition Using NH4OH as the Doping Source |
NANOSCIENCE AND NANOTECHNOLOGY LETTERS
|
| 2018-05 |
Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor |
NANOSCALE
|
| 2018-05 |
High-Performance Ink-Synthesized Cu-Gate Thin-Film Transistor with Diffusion Barrier Formation |
METALS AND MATERIALS INTERNATIONAL
|
| 2018-05 |
Interlayer-assisted atomic layer deposition of MgO as a magnetic tunneling junction insulators |
JOURNAL OF ALLOYS AND COMPOUNDS
|
| 2018-03 |
Cobalt titanium nitride amorphous metal alloys by atomic layer deposition |
JOURNAL OF ALLOYS AND COMPOUNDS
|
| 2018-03 |
Phase-controlled growth of cobalt oxide thin films by atomic layer deposition |
SURFACE & COATINGS TECHNOLOGY
|
| 2018-02 |
Water-Erasable Memory Device for Security Applications Prepared by the Atomic Layer Deposition of GeO2 |
CHEMISTRY OF MATERIALS
|
| 2018-01 |
Enhanced Light Stability of InGaZnO Thin-Film Transistors by Atomic-Layer-Deposited Y2O3 with Ozone |
ACS APPLIED MATERIALS & INTERFACES
|
| 2017-12 |
Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition |
APPLIED SURFACE SCIENCE
|
| 2017-11 |
Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns |
ACS APPLIED MATERIALS & INTERFACES
|
| 2017-11 |
Highly Uniform Atomic Layer-Deposited MoS2@3D-Ni-Foam: A Novel Approach To Prepare an Electrode for Supercapacitors |
ACS APPLIED MATERIALS & INTERFACES
|
| 2017-10 |
Catalytic chemical vapor deposition of large-area uniform two-dimensional molybdenum disulfide using sodium chloride |
NANOTECHNOLOGY
|
| 2017-10 |
Atomistic Simulation Protocol for Improved Design of Si-O-C Hybrid Nanostructures as Li-Ion Battery Anodes: ReaxFF Reactive Force Field |
JOURNAL OF PHYSICAL CHEMISTRY C
|
| 2017-10 |
Characterization of wafer-scale MoS2 and WSe2 2D films by spectroscopic ellipsometry |
CURRENT APPLIED PHYSICS
|
| 2017-10 |
Atomic layer deposition of Y-stabilized ZrO2 for advanced DRAM capacitors |
JOURNAL OF ALLOYS AND COMPOUNDS
|
| 2017-09 |
Micropatternable Double-Faced ZnO Nanoflowers for Flexible Gas Sensor |
ACS APPLIED MATERIALS & INTERFACES
|
| 2017-08 |
Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating |
ACS NANO
|
| 2017-08 |
The Impact of an Ultrathin Y2O3 Layer on GeO2 Passivation in Ge MOS Gate Stacks |
IEEE TRANSACTIONS ON ELECTRON DEVICES
|
| 2017-06 |
Improvement of thermoelectric properties of Bi2Te3 and Sb2Te3 films grown on graphene substrate |
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
|
| 2017-05 |
Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
|
| 2017-05 |
Fabrication of single-phase SnS film by H2 annealing of amorphous SnSx prepared by atomic layer deposition |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
|
| 2017-05 |
A composite layer of atomic-layer-deposited Al2O3 and graphene for flexible moisture barrier |
CARBON
|
| 2017-03 |
Growth behavior of Bi2Te3 and Sb2Te3 thin films on graphene substrate grown by plasma-enhanced chemical vapor deposition |
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
|
| 2017-03 |
Atomic layer deposition of 1D and 2D nickel nanostructures on graphite |
NANOTECHNOLOGY
|
| 2017-03 |
Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant |
CURRENT APPLIED PHYSICS
|
| 2017-02 |
Highly stable 2D material (2DM) field-effect transistors (FETs) with wafer-scale multidyad encapsulation |
NANOTECHNOLOGY
|
| 2017-01 |
Uniform color coating of multilayered TiO2/Al2O3 films by atomic layer deposition |
JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH
|
| 2016-12 |
Bending stability of flexible amorphous IGZO thin film transistors with transparent IZO/Ag/IZO oxide-metal-oxide electrodes |
JOURNAL OF ALLOYS AND COMPOUNDS
|
| 2016-11 |
Highly Flexible Hybrid CMOS Inverter Based on Si Nanomembrane and Molybdenum Disulfide |
SMALL
|
| 2016-11 |
Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt |
NPG ASIA MATERIALS
|
| 2016-11 |
Very high frequency plasma reactant for atomic layer deposition |
APPLIED SURFACE SCIENCE
|