< BK21 플러스 BEST 정보기술 사업단 세미나 개최 안내> 

개최일시 : 2018년 1월 24일 수요일 17:00 ~ 18:00

개최장소 : 제4공학관 D406호

세미나 제목 : Fabrication of high-quality GaAs-based photodetector arrays on Si

발표 초록 :

We report on fabrication and characterization of high-quality 32 × 32 GaAs photodetector (PD) arrays on Si substrates fabricated by wafer bonding and epitaxial lift-off (ELO) techniques. Fabricated GaAs PD arrays showed good crystal quality on Si substrates with Raman spectra and X-ray diffraction measurement. Also, pitch scaling gave us faster ELO process time as well as high-density PD arrays. Furthermore, we investigated electrical and optical characteristics of fabricated GaAs pin PD arrays on Si substrates. Especially, the components of dark current characteristics were also evaluated, because it is very important to explore further pitch scaling.

강연자 성함&직함 / 소속 : 최원준, 책임 연구원(박사) / 한국과학기술연구원(KIST)

초청자 : 전기전자공학과 교수 한상국